Apparatus and method for manufacturing display device

ABSTRACT

An apparatus for manufacturing a display device includes a moving part including a belt that circulates, a roller that circulates the belt, and at least one meandering prevention portion that moves in a first direction parallel to a direction of a rotation shaft of the roller and prevents meandering of the belt, and a polishing head disposed corresponding to the moving part, the polishing head polishing a surface of a base material disposed on a first surface of the belt. A part of the at least one meandering prevention portion faces a second surface of the belt, the second surface being a side surface of the belt.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application claims priority to and benefits of Korean PatentApplication No. 10-2020-0010481 under 35 U.S.C. § 119, filed in theKorean Intellectual Property Office on Jan. 29, 2020, the entirecontents of which are incorporated herein by reference.

BACKGROUND 1. Technical Field

One or more embodiments relate to an apparatus and method formanufacturing a display device.

2. Description of the Related Art

Mobile display devices are widely used. Tablet personal computers (PCs),in addition to small electronic devices, such as mobile phones, arewidely used as mobile display devices.

These mobile display devices may support a variety of functions. Displaydevices may include a display area so as to provide visual information,such as an image or a video, to a user. Recently, as the sizes of othercomponents for driving the display devices may be reduced, the portionof the display area in the display device is gradually increasing, and astructure that may be bendable to have a certain angle in a flat statehas been also been developed.

A process of polishing a surface of a base material may be performedduring a process of manufacturing display devices.

It is to be understood that this background of the technology sectionis, in part, intended to provide useful background for understanding thetechnology. However, this background of the technology section may alsoinclude ideas, concepts, or recognitions that were not part of what wasknown or appreciated by those skilled in the pertinent art prior to acorresponding effective filing date of the subject matter disclosedherein.

SUMMARY

One or more embodiments may include an apparatus and method formanufacturing a display device having high reliability.

Additional aspects will be set forth in part in the description whichfollows and, in part, will be apparent from the description, or may belearned by practice of the presented embodiments of the disclosure.

According to one or more embodiments, an apparatus for manufacturing adisplay device may include a moving part including, a belt thatcirculates, a roller that circulates the belt, and at least onemeandering prevention portion that moves in a first direction parallelto a direction of a rotation shaft of the roller and prevents meanderingof the belt, and a polishing head disposed corresponding to the movingpart, the polishing head polishing a surface of a base material disposedon a first surface of the belt. A part of the at least one meanderingprevention portion may face a second surface of the belt, the secondsurface being a side surface of the belt.

The at least one meandering prevention portion may include a firstmeandering prevention portion and a second meandering preventionportion, and the belt may be disposed between the first meanderingprevention portion and the second meandering prevention portion.

The at least one meandering prevention portion may include a firstroller of which at least part abuts the second surface in the firstdirection, and a first spacing adjusting portion that moves the firstroller.

The at least one meandering prevention portion may further include afirst driving portion that rotates the first roller.

The at least one meandering prevention portion may be disposed in aregion in which a moving direction of the belt changes.

The moving part may further include a cleaning portion that cleans asurface of the belt.

The moving part may further include an adjusting portion facing andpressing against a third surface of the belt, the third surface beingopposite to the first surface of the belt.

The apparatus may further include a measuring part that observesalignment marks disposed on the first surface of the belt.

The apparatus may further include a spray part that removes a polishdisposed on the alignment marks.

The belt may include an opening on which the base material is disposed.

According to one or more embodiments, a method of manufacturing adisplay device may include observing alignment marks disposed on a firstsurface of a belt that circulates, comparing positions of the alignmentmarks with preset positions, and adjusting a position of the belt byusing a meandering prevention portion in accordance with a result of thecomparing of the positions. At least part of the meandering preventionportion may face a second surface of the belt, the second surface beinga side surface of the belt.

The adjusting of the position of the belt may include moving themeandering prevention portion in a first direction to be in contact withthe belt.

The meandering prevention portion may linearly move the belt in thefirst direction.

The meandering prevention portion may be disposed in a region in which amoving direction of the belt changes.

The meandering prevention portion may include a first roller of which atleast a part faces the second surface, and a first spacing adjustingportion that moves the first roller.

The observing of the alignment marks may include removing a polishdisposed on the alignment marks.

The method may further include cleaning a surface of the belt.

The method may further include pressing a third surface of the belt tomaintain a tension of the belt, the third surface of the belt beingopposite to the first surface of the belt.

The method may further include disposing a base material on the firstsurface, and polishing a surface of the base material by using apolishing head.

The belt may include an opening on which the base material is disposed.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects, features, and advantages of certainembodiments of the disclosure will be more apparent from the followingdescription taken in conjunction with the accompanying drawings, inwhich:

FIG. 1 is a schematic front view illustrating an apparatus formanufacturing a display device, according to an embodiment; FIG. 2 is aschematic front view schematically illustrating part of the apparatusfor manufacturing a display device;

FIG. 3 is a schematic plan view schematically illustrating a moving partof the apparatus for manufacturing a display device;

FIG. 4 is an enlarged schematic view of region IV of FIG. 2;

FIGS. 5A and 5B are schematic plan views illustrating part of a movingpart according to another embodiment;

FIG. 6A is a schematic front view illustrating an operating method ofthe apparatus for manufacturing a display device shown in FIG. 1;

FIG. 6B is a schematic plan view illustrating an operating method of theapparatus for manufacturing a display device shown in FIG. 1;

FIGS. 7 and 8 are schematic front views illustrating an operating methodof the apparatus for manufacturing a display device shown in FIG. 1;

FIG. 9 is a schematic plan view schematically illustrating a displaydevice manufactured by the apparatus for manufacturing a display deviceaccording to an embodiment; and

FIG. 10 is a schematic cross-sectional view schematically illustrating adisplay device manufactured by the apparatus for manufacturing a displaydevice according to an embodiment.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Reference will now be made in detail to embodiments, examples of whichare illustrated in the accompanying drawings, wherein like referencenumerals refer to like elements throughout. In this regard, embodimentsmay have different forms and should not be construed as being limited tothe descriptions set forth herein. Accordingly, embodiments are merelydescribed below, by referring to the figures, to explain aspects of thedescription.

As used herein, the term “and/or” includes any and all combinations ofone or more of the associated listed items. The terms “and” and “or” maybe used in the conjunctive or disjunctive sense and may be understood tobe equivalent to “and/or.” Throughout the disclosure, the expression “atleast one of a, b or c” indicates only a, only b, only c, both a and b,both a and c, both b and c, all of a, b, and c, or variations thereof.

The term “overlap” may include layer, stack, face or facing, extendingover, extending under, covering or partly covering or any other suitableterm as would be appreciated and understood by those of ordinary skillin the art. The phrase “not overlap” may include apart from or set asidefrom or offset from and any other suitable equivalents as would beappreciated and understood by those of ordinary skill in the art.

It will be understood that although the terms “first,” “second,” etc.may be used herein to describe various components, these componentsshould not be limited by these terms. These components are only used todistinguish one component from another.

As used herein, the singular forms “a,” “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

It will be further understood that terms such as “comprises”,“comprising”, “has”, “have”, “having”, “includes”, and “including”, asused herein specify the presence of stated features or components, butdo not preclude the presence or addition of one or more other featuresor components.

It will be understood that when a layer, region, or component may bereferred to as being “formed on,” another layer, region, or component,it may be directly or indirectly formed on the other layer, region, orcomponent. For example, intervening layers, regions, or components maybe present.

Sizes of elements in the drawings may be exaggerated or reduced forconvenience of explanation. In other words, since sizes and thicknessesof components in the drawings may be arbitrarily illustrated forconvenience of explanation, the following embodiments are not limitedthereto.

When a certain embodiment may be implemented differently, a specificprocess order may be performed differently from the described order. Forexample, two consecutively described processes may be performedsubstantially at the same time or performed in an order opposite to thedescribed order.

It will be understood that when a layer, region, or component may bereferred to as being “connected to,” another layer, region, orcomponent, it may be directly or indirectly connected to the otherlayer, region, or component. For example, intervening layers, regions,or components may be present. For example, it will be understood thatwhen a layer, region, or component may be referred to as being“electrically connected to,” another layer, region, or component, it maybe directly or indirectly electrically connected to the other layer,region, or component. For example, intervening layers, regions, orcomponents may be present.

About” or “approximately” as used herein is inclusive of the statedvalue and means within an acceptable range of deviation for theparticular value as determined by one of ordinary skill in the art,considering the measurement in question and the error associated withmeasurement of the particular quantity (i.e., the limitations of themeasurement system). For example, “about” may mean within one or morestandard deviations, or within ±30%, 20%, 5% of the stated value.

Unless otherwise defined, all terms used herein (including technical andscientific terms) have the same meaning as commonly understood by thoseskilled in the art to which this disclosure pertains. It will be furtherunderstood that terms, such as those defined in commonly useddictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art andwill not be interpreted in an ideal or excessively formal sense unlessclearly defined in the specification.

FIG. 1 is a schematic front view illustrating an apparatus 100 formanufacturing a display device, according to an embodiment. FIG. 2 is aschematic front view schematically illustrating part of the apparatus100 for manufacturing a display device. FIG. 3 is a schematic front viewschematically illustrating a moving part 120 of the apparatus 100 formanufacturing a display device. FIG. 4 is an enlarged schematic view ofregion IV of FIG. 2.

Referring to FIGS. 1 through 4, the apparatus 100 for manufacturing adisplay device may include an input part 110, the moving part 120, apolishing head 140, and a transport part 150.

In an embodiment, a base material M may be supplied to the input part110 from the outside and seated on the input part 110. In anotherembodiment, the input part 110 may be omitted, and the base material Mmay be disposed (e.g., directly seated) on the moving part 120. However,hereinafter, the case where the base material M may be supplied to theinput part 110 from the outside and seated on the input part 110 will bedescribed in detail.

The input part 110 may include an input support portion 111, an inputroller 112, and an input driving portion 113.

The input support portion 111 may include multiple frames connected toone another. At least one of the frames may be fixed to the ground orthe inside of a building so that the input support portion 111 may befixed.

The input roller 112 may be rotatably arranged on the input supportportion 111. Multiple rollers 112 may be provided. The input rollers 112may be apart from one another and may be arranged on the input supportportion 111.

The input driving portion 113 may be connected to the input roller 112and may rotate the input roller 112. The input driving portion 113 maybe connected to at least one of the input rollers 112. In an embodiment,the input driving portion 113 may include a motor. Multiple inputdriving portions 113 may be provided. Thus, each of the input drivingportions 113 may be arranged on each of the input rollers 112. Inanother embodiment, the input driving portion 113 may include a chainconnected to the input rollers 112, a sprocket connected to the chainand rotating the chain, and a motor connected to the sprocket. Inanother embodiment, the input driving portion 113 may include alldevices and structures connected to each of the input rollers 112 so asto rotate each input roller 112 or connected to some or all of the inputrollers 112 so as to simultaneously rotate the input rollers 112.However, hereinafter, for convenience of explanation, the case where theinput driving portion 113 may be arranged on each input roller 112 so asto rotate each input roller 112 will be described in detail.

The moving part 120 may provide a region in which the base material Msupplied from the input part 110 may be polished. The moving part 120may include a belt 121 that circulates, a roller 122 circulating thebelt 121, a driving portion 123 driving the roller 122, a meanderingprevention portion 124 (124A, 124B, 124C, and/or 124D) preventingmeandering of the belt 121, an adjusting portion 125 pressing the belt121, and a cleaning portion 126 cleaning the surface of the belt 121.

The belt 121 may be rotated by the roller 122, and the position of thebelt 121 may be changed according to rotation of the roller 122. In anembodiment, the belt 121 may include an opening 121OP on which the basematerial M may be seated. The opening 121OP may be arranged tocorrespond to a first surface S1 of the belt 121, and the shape of theopening 121OP may correspond to the shape of the base material M. Inanother embodiment, a guard portion may be provided to the surface ofthe belt 121. The guard portion may be arranged on the first surface S1of the belt 121, and the base material M may be inserted into the guardportion. However, for convenience of explanation, the case where thebelt 121 includes the opening 121OP will be described in detail.

A depth d1 of the opening 121OP may be less than or similar to athickness d2 of the base material M. The depth d1 of the opening 121OPmay be equal to the thickness d2 of the base material M. Thus, in casethat the polishing head 140 polishes edges of the base material M,pressure of the polishing head 140 may be prevented from beingconcentrated on the edges of the base material M due to a step betweenthe belt 121 and the base material M.

The opening 121OP may designate the position of the base material M incase that the base material M may be seated on the belt 121. Here,designating of the position means that, because the base material M maybe inserted into the opening 121OP, the position of the base material Mmay not be changed relative to the belt 121 due to the polishing processeven in case that polishing may be performed. Thus, the surface of thebase material M may be uniformly polished.

The belt 121 may include an alignment mark AM on the first surface S1 onwhich the base material M may be seated. In an embodiment, the alignmentmark AM may be formed by irradiating laser on the first surface S1 ofthe belt 121. In another embodiment, the alignment mark AM may beattached to the first surface S1 of the belt 121.

Multiple alignment marks AM may be arranged on the first surface S1 ofthe belt 121. In an embodiment, the alignment marks AM may be arrangedat regular intervals. A measuring part 160 that will be described latermay observe the alignment marks AM provided on the belt 121 so that itmay be determined whether the belt 121 meanders, and the position of thealignment marks AM may be checked so that the base material M may beinput to the moving part 120. Also, the measuring part 160 may observe adistance between the alignment marks AM so that a degree of stretchingof the belt 121 may be determined.

The alignment marks AM may have a variety of shapes. For example, thealignment marks AM may have a cross shape. In another example, thealignment marks AM may have a rectangular shape, a polygonal shape, or acircular shape. The width of each of the alignment marks AM may be about50 μm. In another embodiment, the width of each alignment mark AM may beabout 50 μm or less, or about 50 μm or more.

In an embodiment, the belt 121 may include multiple layers. For example,the belt 121 may include a first layer 121 a and a second layer 121 b.The first layer 121 a may be a layer that contacts the roller 122, andthe second layer 121 b may be a layer on which the base material M maybe arranged. The depth d1 of the opening 121OP may be less than athickness t1 of the second layer 121 b.

The first layer 121 a may include a fiber material. For example, thefirst layer 121 a may include a urethane fiber or the like. The secondlayer 121 b may include a material having excellent chemical resistance.For example, the second layer 121 b may include at least one ofunsaturated polyester (UPE) and Teflon. Because a polishing process maybe performed on an upper surface of the second layer 121 b by using thepolishing head 140, the second layer 121 b may include a material havingexcellent chemical resistance and abrasion resistance.

In another embodiment, the belt 121 may have a single layer structure.The belt 121 may include a material having excellent chemicalresistance. For example, the belt 121 may include at least one of UPEand Teflon.

The roller 122 may rotate so as to circulate the belt 121. For example,the roller 122 may rotate around a rotation shaft 122X. Multiple rollers122 may be provided. The rollers 122 may be disposed apart from oneanother so as to maintain a constant tension of the belt 121.

The driving portion 123 may include a motor, etc., that may be arrangedon the rollers 122 so as to rotate the rollers 122 around the rotationshaft 122X. The driving portion 123 may be arranged on at least one ofthe rollers 122.

The meandering prevention portion 124 may prevent meandering of the belt121. The meandering prevention portion 124 may be arranged with the belt121 between meandering prevention portions 124. For example, a firstmeandering prevention portion 124A and a second meandering preventionportion 124B may be arranged with the belt 121 therebetween. In detail,the first meandering prevention portion 124A and the second meanderingprevention portion 124B may be arranged in a first direction (forexample, a y-direction or −y-direction).

The meandering prevention portion 124 may be arranged in a region R inwhich the moving direction of the belt may be changed. The region R, inwhich the moving direction of the belt 121 may be changed, may bedefined as a region in which the belt 121 may be circulated in a seconddirection (for example, an x-direction or −x-direction) and the movingdirection of the belt 121 may be changed into a direction opposite tothe second direction (for example, an −x-direction or x-direction). Asanother example, the region R, in which the moving direction of the belt121 may be changed, may be defined as a region in which the belt 121 maybe circulated in the direction opposite to the second direction and themoving direction of the belt 121 may be changed into the seconddirection. The meandering prevention portion 124 may be arrangedadjacent to the rollers 122. For example, the first meanderingprevention portion 124A and a third meandering prevention portion 124Cmay be arranged in the second direction (for example, an x-direction or−x-direction) crossing the first direction. Because the meanderingprevention assembly 124 may be arranged on both ends of the belt 121,meandering of the belt 121 may be prevented.

At least part of the meandering prevention portion 124 may face a secondsurface S2 that may be a side surface of the belt 121. The secondsurface S2 may be defined as a surface of the belt 121 that may not bethe first surface S1 and a third surface S3 opposite to the firstsurface S1. Thus, the meandering prevention portion 124 may guide thebelt 121 so as to circulate in a constant path. Also, because themeandering prevention portion 124 may be in contact with the secondsurface S2 that may not be the first surface S1, damage of the firstsurface S1 may be prevented.

The meandering prevention portion 124 may move in the first direction(for example, a y-direction or −y-direction) parallel to the rotationshaft 122X of the rollers 122. In particular, the meandering preventionportion 124 may make a linear motion in the first direction. The firstmeandering prevention portion 124A and the second meandering preventionportion 1246 may move independently. For example, the first meanderingprevention portion 124A and the second meandering prevention portion1246 may move in the same direction. In another example, the firstmeandering prevention portion 124A and the second meandering preventionportion 1246 may move in opposite directions.

The meandering prevention portion 124 may include a first roller 200, afirst driving portion 201, and a first spacing adjusting portion 202.

At least part of the first roller 200 may abut the second surface S2 ofthe belt 121 in the first direction (for example, a y-direction or−y-direction). Also, the first roller 200 may be rotatably arranged. Inan embodiment, the first roller 200 may be in contact with the rollers122. In another embodiment, the first roller 200 may be apart from therollers 122. In an embodiment, the first roller 200 may rotate in anopposite direction to the rollers 122. For example, in case that therollers 122 rotate clockwise, as shown in FIG. 2, the first roller 200may rotate counterclockwise, as shown in FIG. 2.

The first driving portion 201 may rotate the first roller 200. The firstdriving portion 201 may include a motor, etc., similarly to the drivingportion 123, and may be arranged on the first roller 200.

The first spacing adjusting portion 202 may move the first roller 200.The first spacing adjusting portion 202 may be connected to the firstroller 200 and may linearly move the first roller 200. For example, thefirst spacing adjusting portion 202 may move the first roller 200 in thefirst direction (for example, a y-direction or −y-direction). The firstspacing adjusting portion 202 may have a variety of shapes. For example,the first spacing adjusting portion 202 may include a cylinder. Inanother embodiment, the first spacing adjusting portion 202 may alsoinclude a ball screw and a motor connected to the ball screw. In anotherexample, the first spacing adjusting portion 202 may also include alinear motor. As described above, the first spacing adjusting portion202 may include all devices and all structures that may linearly movethe first roller 200.

The adjusting portion 125 may press the third surface S3 of the belt121. The adjusting portion 125 may face the third surface S3. Forexample, the adjusting portion 125 may be arranged between the rollers122. The adjusting portion 125 may be in contact with the third surfaceS3 and may press the belt 121 so as to maintain the tension of the belt121. Because the adjusting portion 125 does not press the first surfaceS1 of the belt 121, damage of the first surface S1 may be prevented. Inan embodiment, at least one adjusting portion 125 may be provided. Theadjusting portion 125 may include a second roller 125 a, a seconddriving portion 125 b, and second spacing adjusting portions 125 c 1 and125 c 2.

The second roller 125 a may be rotatably arranged, and the seconddriving portion 125 b may be connected to the second roller 125 a so asto rotate the second roller 125 a. The second driving portion 125 b mayinclude a motor, etc., similarly to the first driving portion 201.

The second spacing adjusting portions 125 c 1 and 125 c 2 may move thesecond roller 125 a. The second spacing adjusting portions 125 c 1 and125 c 2 may be connected to the second roller 125 a so as to linearlymove the second roller 125 a. The second spacing adjusting portions 125c 1 and 125 c 2 may include all devices and all structures that maylinearly move the second roller 125 a, similarly to the first spacingadjusting portion 202.

In an embodiment, the second spacing adjusting portions 125 c 1 and 125c 2 may include a first portion 125 c 1 and a second portion 125 c 2. Adirection in which the first portion 125 c 1 linearly moves the secondroller 125 a, and a direction in which the second portion 125 c 2linearly moves the second roller 125 a may be different from each other.For example, the first portion 125 c 1 may move the second roller 125 ain a third direction (for example, a z-direction or −z-direction)crossing the first direction and/or the second direction. The secondportion 125 c 2 may move the second roller 125 a in the second direction(for example, an x-direction or −x-direction).

The cleaning portion 126 may clean the surface of the belt 121. In anembodiment, the cleaning portion 126 may include a third roller 126 a, athird driving portion 126 b, a third spacing adjusting portion 126 c, afirst cleaning roller 126 d, and a second cleaning roller 126 e.

The third roller 126 a, the third driving portion 126 b, and the thirdspacing adjusting portion 126 c may be similar to the second roller 125a, the second driving portion 125 b, and the second spacing adjustingportions 125 c 1 and 125 c 2. Thus, a detailed description thereof willbe omitted. The third roller 126 a may support the belt 121 and thefirst cleaning roller 126 d while the first cleaning roller 126 d cleansthe surface of the belt 121.

In an embodiment, each of the first cleaning roller 126 d and the secondcleaning roller 126 e may rotate. Each of the first cleaning roller 126d and the second cleaning roller 126 e may be connected to a drivingportion so as to rotate.

The surface of the first cleaning roller 126 d and the surface of thesecond cleaning roller 126 e may be in contact with each other. Thefirst cleaning roller 126 d and the second cleaning roller 126 e mayrotate in different directions. For example, in case that the firstcleaning roller 126 d rotates counterclockwise, as shown in FIG. 2, thesecond cleaning roller 126 e may rotate clockwise, as shown in FIG. 2.

The first cleaning roller 126 d may clean the surface of the belt 121.In detail, the first cleaning roller 126 d may be in contact with thebelt 121 so as to adsorb a polish that remains on the surface of thebelt 121. Also, the second cleaning roller 126 e may adsorb the polishadsorbed onto the first cleaning roller 126 d. The adsorption force ofthe second cleaning roller 126 e may be greater than that of the firstcleaning roller 126 d. Thus, because, even in case that the polish maybe adsorbed onto the surface of the first cleaning roller 126 d, thesecond cleaning roller 126 e simultaneously adsorbs the polish adsorbedonto the surface of the first cleaning roller 126 d, the adsorptionforce of the first cleaning roller 126 d may be maintained.

In an embodiment, the cleaning portion 126 may include a third cleaningroller 126 f and a fourth cleaning roller 126 g. Each of the thirdcleaning roller 126 f and the fourth cleaning roller 126 g may bearranged, similarly to each of the first cleaning roller 126 d and thesecond cleaning roller 126 e.

The third cleaning roller 126 f and the fourth cleaning roller 126 g maybe arranged in the region R in which the moving direction of the belt121 may be changed. While the third cleaning roller 126 f cleans thesurface of the belt 121, the roller 122 may support the third cleaningroller 126 f. Thus, there may be no need for providing an additionalthird roller 126 a, an additional third driving portion 126 b, and anadditional third spacing adjusting portion 126 c for supporting thethird cleaning roller 126 f.

In an embodiment, the cleaning portion 126 may include the third roller126 a, the third driving portion 126 b, the third spacing adjustingportion 126 c, and the first through fourth cleaning rollers 126 dthrough 126 g. In some embodiments, the cleaning portion 126 may includethe third roller 126 a, the third driving portion 126 b, the thirdspacing adjusting portion 126 c, the first cleaning roller 126 d, andthe second cleaning roller 126 e and may not include the third cleaningroller 126 f and the fourth cleaning roller 126 g. In some embodiments,the cleaning portion 126 may include the third cleaning roller 126 f andthe fourth cleaning roller 126 g and may not include the third roller126 a, the third driving portion 126 b, the third spacing adjustingportion 126 c, the first cleaning roller 126 d, and the second cleaningroller 126 e. Hereinafter, for convenience of explanation, the casewhere the cleaning portion 126 includes the third roller 126 a, thethird driving portion 126 b, the third spacing adjusting portion 126 c,the first cleaning roller 126 d and the second cleaning roller 126 e anddoes not include the third cleaning roller 126 f and the fourth cleaningroller 126 g will be described in detail.

The moving part 120 may further include a base material supportingportion 127 arranged on the belt 121. The base material supportingportion 127 may support the base material M in case that the surface ofthe base material M may be polished. The base material supportingportion 127 may be arranged between the rollers 122 so as to correspondto the polishing head 140. The base material supporting portion 127 mayhave the shape of a plate.

The polishing head 140 may be arranged so as to correspond to the movingpart 120. For example, the polishing head 140 may be arranged on thefirst surface S1 of the belt 121. The polishing head 140 may move invarious directions. For example, the polishing head 140 may move in atleast one of the x-direction, the y-direction, and the z-direction ofFIG. 1.

The polishing head 140 may include a polishing head body portion 141, apolishing head rotation portion 142, a polishing pad 143, and apolishing driving portion 144.

In an embodiment, the polishing head body portion 141 may be connectedto the polishing driving portion 144 and may make a linear motion. Inanother embodiment, the polishing head body portion 141 may be connectedto the polishing driving portion 144 so as to make a reciprocatingvibration motion. Hereinafter, the case where the polishing head bodyportion 141 may be connected to the polishing driving portion 144 andmakes a linear motion will be described in detail.

The polishing head rotation portion 142 may be rotatably connected tothe polishing head body portion 141. The polishing pad 143 may beconnected to the polishing head rotation portion 142.

The polishing pad 143 may be arranged on the polishing head rotationportion 142, may have the shape of a plate, and may polish the surfaceof the base material M.

The polishing driving portion 144 may include a first polishing drivingportion 144A, which may be arranged inside the polishing head bodyportion 141 so as to rotate the polishing head rotation portion 142, anda second polishing driving portion 144B, which may be connected to thepolishing head body portion 141 and linearly moves the polishing headbody portion 141.

In an embodiment, the first polishing driving portion 144A may include amotor connected to the polishing head rotation portion 142 so as torotate the polishing head rotation portion 142. In another embodiment,the first polishing driving portion 144A may include a deceleratorarranged between the motor connected to the polishing head rotationportion 142 so as to rotate the polishing head rotation portion 142 andthe polishing head rotation portion 142.

The second polishing driving portion 144B may linearly move thepolishing head body portion 141. At least one second polishing drivingportion 144B may be provided. For example, multiple second polishingdriving portions 144B may be provided. Each of the second polishingdriving portions 144B may linearly move the polishing head body portion141 in one of the x-direction, the y-direction, and the z-direction ofFIG. 1. The second polishing driving portion 144B may be provided invarious shapes. For example, the second polishing driving portion 144Bmay include a cylinder. In another example, the second polishing drivingportion 144B may include a ball screw and a motor connected to the ballscrew. In another example, the second polishing driving portion 144B mayalso include a linear motor. As described above, the second polishingdriving portion 144B may include all devices and all structures that maybe connected to the polishing head body portion 141 and linearly movethe polishing head body portion 141 in various directions.

In an embodiment, the transport part 150 may transport the base materialM so as to carry the base material M to the outside. In anotherembodiment, the transport part 150 may be omitted so that the basematerial M may be directly carried out of the moving part 120 to theoutside. However, hereinafter, the case where the base material M may becarried out of the transport part 150 to the outside will be describedin detail.

The transport part 150 may be apart from the moving part 120 so as totransport the polished base material M. The transport part 150 mayinclude a transport supporting portion 151, a transport roller 152, anda transport driving portion 153. The transport supporting portion 151,the transport roller 152, and the transport driving portion 153 may beprovided in the same way or similarly to the input support portion 111,the input roller 112, and the input driving portion 113.

The apparatus 100 for manufacturing a display device may further includethe measuring part 160 and a spray part 170.

The measuring part 160 may observe the alignment marks AM arranged onthe first surface S1. Also, the measuring part 160 may observe the basematerial M arranged on the first surface S1. In an embodiment, multiplemeasuring parts 160 may be provided. The measuring part 160 may observeeach of the alignment marks AM and the base material M. Thus, a degreeof meandering of the belt 121, the surface state of the belt 121, andwhether the base material M may be arranged to correspond to the opening121OP may be observed. The measuring part 160 may be an image capturingdevice, such as a camera.

The spray part 170 may remove a polish arranged on the alignment marksAM. For example, the polish may be disposed (e.g., arranged) on thealignment marks AM before the measuring part 160 observes the alignmentmarks AM. The polish may prevent the measuring part 160 from observingthe alignment marks AM. The spray part 170 may spray gas so as to removethe polish arranged on the alignment marks AM. The spray part 170 may bean air blower.

FIGS. 5A and 5B are schematic plan views illustrating part of a movingpart according to another embodiment. The same reference numerals ofFIGS. 5A and 5B as those of FIG. 2 may refer to the same elements andthus, a redundant description thereof will be omitted.

Referring to FIG. 5A, a moving part 120-1 may include a belt 121, aroller 122, a driving portion 123, a cleaning portion 126-1, and a basematerial support portion 127.

The cleaning portion 126-1 may clean the belt 121. The cleaning portion126-1 may include a fixing roller 126 a-1, a cleaning container 126 b-1,a cleaning adjusting portion 126 c-1, and a cleaning solution removalportion 126 d-1.

The fixing roller 126 a-1 may guide the belt 121 toward the cleaningcontainer 126 b-1. Thus, the belt 121 may be in contact with a cleaningsolution in the cleaning container 126 b-1. The fixing roller 126 a-1may be rotatable. Also, a driving portion may be connected to the fixingroller 126 a-1.

The cleaning container 126 b-1 may store the cleaning solution. Thecleaning container 126 b-1 may be connected to the cleaning adjustingportion 126 c-1 so as to adjust the cleaning solution. For example, thecleaning adjusting portion 126 c-1 may adjust the amount of the cleaningsolution inside the cleaning container 126 b-1. Also, the cleaningadjusting portion 126 c-1 may exchange the cleaning solution.

The cleaning solution removal portion 126 d-1 may remove cleaningsolution that remains in the belt 121. For example, the cleaningsolution removal portion 126 d-1 may be a knife that contacts the belt121. In another example, the cleaning solution removal portion 126 d-1may be an evaporator for evaporating the cleaning solution or anabsorber for absorbing the cleaning solution.

Referring to FIG. 5B, a moving part 120-2 may include a belt 121, aroller 122, a driving portion 123, a cleaning portion 126-2, and a basematerial support portion 127.

The cleaning portion 126-2 may clean the belt 121. The belt 121 maypenetrate the cleaning portion 126-2. In an embodiment, the cleaningportion 126-2 may include a brush. A polish may be removed using thebrush. In another embodiment, the cleaning portion 126-2 may spray acleaning solution toward the belt 121. The cleaning solution may bewater. In some embodiments, the cleaning portion 126-2 may furtherinclude a cleaning solution removal portion (not shown) for removing thecleaning solution.

Hereinafter, an operation of the apparatus 100 for manufacturing adisplay device will be described in detail.

FIG. 6A is a schematic front view illustrating an operating method ofthe apparatus 100 for manufacturing a display device shown in FIG. 1.FIG. 6B is a schematic plan view illustrating an operating method of theapparatus 100 for manufacturing a display device shown in FIG. 1. FIGS.7 and 8 are schematic front views illustrating an operating method ofthe apparatus 100 for manufacturing a display device shown in FIG. 1.

Referring to FIGS. 6A and 6B, alignment marks AM arranged on a firstsurface S1 of the belt 121 may be observed. A measuring part 160 mayobserve the alignment marks AM. Multiple measuring parts 160 may beprovided. The measuring parts 160 may observe the alignment marks AM.For example, the measuring parts 160 may observe a first alignment markAM1, a second alignment mark AM2, a third alignment mark AM3, and afourth alignment mark AM4. Thus, whether meandering of the belt 121occurs, the surface state of the belt 121, or whether the belt 121 maybe stretched may be checked.

In case that the measuring parts 160 observe the alignment marks AM, thepolish arranged on the alignment marks AM may be removed. In detail, thespray part 170 may spray a gas A onto the surface of the belt 121 so asto remove the polish. The gas A may be air. For example, in case thatthe polish may be arranged on the alignment marks AM, the spray part 170may spray the gas A onto the first surface S1 of the belt 121 so as toremove the polish. Thus, the measuring parts 160 may easily observe thealignment marks AM.

Positions of the alignment marks AM may be compared with presetpositions. For example, the position of the first alignment mark AM1 andthe position of the second alignment mark AM2 may be compared with apreset position of the first alignment mark AM1 and a preset position ofthe second alignment mark AM2, so that it may be determined whethermeandering of the belt 121 occurs. Also, the position of the thirdalignment mark AM3 and the position of the fourth alignment mark AM4 maybe compared with a preset position of the third alignment mark AM3 and apreset position of the fourth alignment mark AM4, so that it may bedetermined whether meandering of the belt 121 occurs. In anotherexample, the position of the first alignment mark AM1 and the positionof another alignment mark (e.g., the third alignment mark AM3) may becompared with the preset position of the first alignment mark AM1 andanother alignment mark (e.g., the preset position of the third alignmentmark AM3), so that it may be determined whether the belt 121 may bestretched.

In case that the positions of the alignment marks AM may be differentfrom the preset positions, the position of the belt 121 may be adjustedby using a meandering prevention portion 124. In detail, the meanderingprevention portion 124 may move in a first direction (for example, ay-direction or −y-direction) so as to be in contact with the belt 121. Afirst meandering prevention portion 124A and a second meanderingprevention portion 124B may move independently. For example, in a statein which, in FIG. 6B, the first meandering prevention portion 124A maybe stopped, the second meandering prevention portion 124B may move inthe y-direction or −y-direction. In another example, in a state in whichthe second meandering prevention portion 124B may be stopped, the firstmeandering prevention portion 124A may move in the y-direction or−y-direction. In another example, the first meandering preventionportion 124A and the second meandering prevention portion 124B may movein the same direction or in opposite directions.

The meandering prevention portion 124 may move the belt 121 in the firstdirection (for example, the y-direction or −y-direction). The belt 121moving in the first direction means that part of the belt 121 arrangedin a region in which the moving direction of the belt 121 may bechanged, moves in the first direction. As another example, the belt 121moving in the first direction may mean that the belt 121 entirely movesin the first direction. Thus, the meandering prevention portion 124 mayrecover a circulating path of the belt 121 in case that the circulatingpath of the belt 121 may be changed, e.g., due to an external factor.

Also, a third surface S3 of the belt 121 may be pressed so that thetension of the belt 121 may be adjusted (e.g., maintained). In detail,the adjusting portion 125 may press the third surface S3 of the belt121. Thus, the tension of the belt 121 may be maintained. In theembodiment, the belt 121 may circulate due to a roller 122 and may be incontact with the polishing head 140. Thus, the length of the belt 121may be stretched while a polishing process may be performed. Theadjusting portion 125 may press the third surface S3 of the belt 121 soas to maintain the tension of the belt 121. Because the adjustingportion 125 may not be in contact with the first surface S1 of the belt121, damage of the first surface S1 may be prevented.

The base material M may be arranged on an input part 110 from theoutside in various manners. For example, the base material M may betransported to the input part 110 through a robot arm. In anotherexample, the base material M may also be supplied by a user to the inputpart 110 manually through an additional tool.

The base material M may also be disposed (e.g., directly mounted) on theinput part 110 or may be arranged on the input part 110 in a state inwhich the base material M may be seated on an additional carrier member(not shown). The carrier member may have the shape of a plate includingglass or the like. Hereinafter, for convenience of explanation, the casewhere the base material M may be disposed (e.g., directly arranged) onthe input unit 110 will be described in detail.

The base material M have various shapes. For example, the base materialM may be used in case that a single display device (not shown) may bemanufactured. In another example, the base material M may be used incase that multiple display devices may be manufactured. After multipledisplay areas (not shown) may be formed in the base material M, the basematerial M may be divided into multiple parts so as to correspond toeach of the display areas.

The base material M may include various materials. The base material Mmay include glass or polymer resin, such as polyethersulfone,polyarylate, polyetherimide, polyethylene naphthalate, polyethyleneterephthalate, polyphenylene sulfide, polyimide, polycarbonate (PC),cellulose triacetate (TAC), cellulose acetate propionate, or acombination thereof.

The measuring unit 160 may observe the base material M so that an inputdriving portion 113 and a driving portion 123 may be induced so as tointerlock with each other. In case that the driving portion 123operates, the roller 122 may rotate so as to rotate the belt 121.

The base material M may be transported from the input part 110 to themoving part 120. The base material M may be seated on the belt 121. Inparticular, the base material M may be arranged so as to correspond toan opening 121OP. The measuring part 160 may observe the base material Mso that the base material M may be induced to be seated on the opening121OP. Thus, the position of the base material M may not be changedrelative to the belt 121.

Referring to FIG. 7, the driving portion 123 may operate in such a waythat the base material M may be arranged in a preset position. The basematerial M may be arranged on a bottom surface of the polishing head140.

In an embodiment, the operation of the driving portion 123 may bestopped so that the position of the base material M may be fixed.Subsequently, a first polishing driving portion 144A and a secondpolishing driving portion 144B may operate so that the polishing head140 may make a linear motion and a surface of the base material M may bepolished. In another embodiment, a surface of the base material M may bepolished in a state in which the operation of the driving portion 123may be maintained. A surface of the base material M may be polishedwhile the base material M moves along a certain path (for example, anx-direction).

While polishing may be performed or before polishing may be performed, apolish P may be supplied to one surface of the base material M. Thepolish P may be supplied in various manners. For example, the polish Pmay be supplied to the base material M through the polishing head 140.In detail, the polish P may be supplied from the outside through a flowpath formed inside the polishing head 140. A hole, through which thepolish P may be supplied, may be formed in the polishing pad 143. Inanother example, the polish P may also be supplied to one surface of thebase material M through a polish supplying portion 180 separatelyprovided for each polishing head 140. The polish supplying portion 180may be provided in the shape of a nozzle. Hereinafter, for convenienceof explanation, the case where the polish supplying portion 180 may beseparately provided from the polishing head 140 and the polish P may besupplied to the base material M before the polishing head 140 operateswill be described in detail.

The polish P may include deionized water (DIW), a surfactant, and aslurry.

Referring to FIG. 8, polishing on one surface of the base material M maybe finished so that the base material M may be transported to atransport part 150. The measuring part 160 may check the position of thebase material M so that the driving portion 123 and a transport drivingportion 153 may be induced to interlock with each other.

Also, the surface of the belt 121 may be cleaned. In detail, polish Pthat remains on the surface of the belt 121 may be removed. In anembodiment, a cleaning portion 126 may include a third roller 126 a, athird driving portion 126 b, a third spacing adjusting portion 126 c, afirst cleaning roller 126 d, and a second cleaning roller 126 e. Thefirst cleaning roller 126 d may clean the surface of the belt 121. Thesecond cleaning roller 126 e may be connected to the first cleaningroller 126 d so as to adsorb the polish P adsorbed onto the firstcleaning roller 126 d. The first cleaning roller 126 d and the secondcleaning roller 126 e may rotate in different directions. In anotherembodiment, the cleaning portion 126 may include the fixing roller 126a-1, the cleaning container 126 b-1, the cleaning adjusting portion 126c-1, and the cleaning solution removal portion 126 d-1, which are shownin FIG. 5A, and may clean the belt 121. In another embodiment, as shownin FIG. 5B, the belt 121 may penetrate the cleaning portion 126-2, andthe cleaning portion 126-2 may clean the belt 121.

In an embodiment, the apparatus 100 for manufacturing a display devicemay include the meandering prevention portion 124 so as to preciselyadjust the belt 121 on which the base material M may be seated. Thus, asurface of the base material M may be uniformly flat.

FIG. 9 is a schematic plan view schematically illustrating a displaydevice manufactured by the apparatus for manufacturing a display deviceaccording to an embodiment.

Referring to FIG. 9, a display device 1 may include a display area DA,in which an image may be realized, and a non-display area NDA, in whichno image may be realized. The display device 1 may provide an image byusing light emitted from pixels PX arranged in the display area DA. Eachof the pixels PX may emit red, green, blue, or white light.

The display device 1 that may be a device for displaying an image may bea portable mobile device, such as a game console, a multimedia device, atiny personal computer (PC). The display device 1 that will be describedlater may include a liquid crystal display (LCD) device, anelectrophoretic display device, an organic light-emitting displaydevice, an inorganic electroluminescent (EL) display device, a fieldemission display device, a surface-conduction electron-emitter displaydevice, a quantum dot display device, a plasma display device, or acathode ray display device. Hereinafter, the display device 1manufactured by an apparatus for manufacturing a display deviceaccording to an embodiment will be described as an example of an organiclight-emitting display device. However, manufacturing of a displaydevice in various manners described above may be described inembodiments.

The pixels PX may be electrically connected to each of a scan line SLand a data line DLn. The scan line SL may extend in the x-direction, andthe data line DLn may extend in the y-direction.

FIG. 10 is a schematic cross-sectional view schematically illustrating adisplay device manufactured by the apparatus for manufacturing a displaydevice according to an embodiment.

Referring to FIG. 10, a display layer DL and a thin-film encapsulationlayer TFE may be arranged on a substrate 10. The display layer DL mayinclude a pixel circuit layer PCL and a display element layer DEL.

The substrate 10 may include glass or polymer resin, such aspolyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate,polyethylene terephthalate, polyphenylene sulfide, polyimide, PC, TAC,cellulose acetate propionate, or a combination thereof.

A barrier layer (not shown) may be further arranged between the displaylayer DL and the substrate 10. The barrier layer that may be a barrierlayer for preventing penetration of external foreign substances may havea single layer or multi-layer structure including an inorganic material,such as silicon nitride (SiN_(x)) (where x>0) or silicon oxide (SiO_(x))(where x>0).

The pixel circuit layer PCL may be arranged on the substrate 10. FIG. 10illustrates that the pixel circuit layer PCL includes a thin-filmtransistor TFT, a buffer layer 11, a first gate insulating layer 13 a, asecond gate insulating layer 13 b, an interlayer insulating layer 15,and a planarization insulating layer 17, which may be arranged underand/or on components of the thin-film transistor TFT.

The buffer layer 11 may include inorganic insulating materials, such assilicon nitride, silicon oxynitride, and silicon oxide, and may have asingle layer or multi-layer structure including the inorganic insulatingmaterials described above.

The thin-film transistor TFT may include a semiconductor layer 12, andthe semiconductor layer 12 may include polysilicon. As another example,the semiconductor layer 12 may include amorphous silicon, an oxidesemiconductor, or an organic semiconductor. The semiconductor layer 12may include a channel region 12 c, and a drain region 12 a and a sourceregion 12 b, which may be arranged at both sides of the channel region12 c. A gate electrode 14 may overlap the channel region 12 c.

The gate electrode 14 may include a low resistance metallic material.The gate electrode 14 may include conductive materials includingmolybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or acombination thereof, and may have a multi-layer or single layerstructure including the materials described above.

The first gate insulating layer 13 a between the semiconductor layer 12and the gate electrode 14 may include an inorganic insulating material,such as silicon oxide (SiO₂), silicon nitride (SiN_(x)), siliconoxynitride (SiON), aluminum oxide (Al₂O₃), titanium oxide (TiO₂),tantalum oxide (Ta₂O₅), hafnium oxide (HfO₂), zinc oxide (ZnO₂), or acombination thereof.

The second gate insulating layer 13 b may be provided to cover the gateelectrode 14. The second gate insulating layer 13 b may include aninorganic insulating material, such as, silicon oxide (SiO₂), siliconnitride (SiN_(x)), silicon oxynitride (SiON), aluminum oxide (Al₂O₃),titanium oxide (TiO₂), tantalum oxide (Ta₂O₅), hafnium oxide (HfO₂),zinc oxide (ZnO₂), or a combination thereof, similarly to the first gateinsulating layer 13 a.

An upper electrode Cst2 of a storage capacitor Cst may be arranged onthe second gate insulating layer 13 b. The upper electrode Cst2 mayoverlap the gate electrode 14 thereunder. The gate electrode 14 and theupper electrode Cst2 that overlap each other with the second gateinsulating layer 13 b therebetween may form the storage capacitor Cst.For example, the gate electrode 14 may function as a lower electrodeCst1 of the storage capacitor Cst.

In this way, the storage capacitor Cst and the thin-film transistor TFTmay overlap each other. In some embodiments, the storage capacitor Cstmay not overlap the thin-film transistor TFT.

The upper electrode Cst2 may include Al, platinum (Pt), palladium (Pd),silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd),iridium (Ir), chromium (Cr), calcium (Ca), Mo, Ti, tungsten (W), and/orCu and may have a single layer or multi-layer structure including thematerials described above.

The interlayer insulating layer 15 may cover the upper electrode Cst2.The interlayer insulating layer 15 may include silicon oxide (SiO₂),silicon nitride (SiN_(x)), silicon oxynitride (SiON), aluminum oxide(Al₂O₃), titanium oxide (TiO₂), tantalum oxide (Ta₂O₅), hafnium oxide(HfO₂), zinc oxide (ZnO₂), or a combination thereof. The interlayerinsulating layer 15 may have a single layer or multi-layer structureincluding the inorganic insulating materials described above.

Each of a drain electrode 16 a and a source electrode 16 b may bearranged on the interlayer insulating layer 15. The drain electrode 16 aand the source electrode 16 b may include materials having goodconductivity. The drain electrode 16 a and the source electrode 16 b mayinclude conductive materials including Mo, Al, Cu, Ti, or a combinationthereof, and may have a multi-layer or single layer structure includingthe materials described above. In an embodiment, the drain electrode 16a and the source electrode 16 b may have a multi-layer structure ofTi/Al/Ti.

The planarization insulating layer 17 may have a single layer ormulti-layer structure including layers formed of organic materials orinorganic materials. In case that the planarization insulating layer 17includes organic materials, the planarization insulating layer 17 mayinclude general-purpose polymer, such as polymethylmethacrylate (PMMA)or polystyrene (PS), a polymer derivative having a phenol-based group,acryl-based polymer, imide-based polymer, aryl ether-based polymer,amide-based polymer, fluorine-based polymer, p-xylene-based polymer,vinyl alcohol-based polymer, or a blend thereof. On the other hand, incase that the planarization insulating layer 17 includes inorganicmaterials, the planarization insulating layer 17 may include siliconoxide (SiO₂), silicon nitride (SiN_(x)), silicon oxynitride (SiON),aluminum oxide (Al₂O₃), titanium oxide (TiO₂), tantalum oxide (Ta₂O₅),hafnium oxide (HfO₂), zinc oxide (ZnO₂), or a combination thereof. Afterthe planarization insulating layer 17 may be formed, a polishing processmay be performed so as to provide a flat top surface.

A display element layer DEL may be arranged on the pixel circuit layerPCL having the structure described above. The display element layer DELmay include an organic light-emitting diode OLED, and a pixel electrode21 of the organic light-emitting diode OLED may be electricallyconnected to the thin-film transistor TFT via a contact hole of theplanarization insulating layer 17.

The pixels PX may include the organic light-emitting diode OLED and thethin-film transistor TFT. Each of the pixels PX may emit red, green, orblue light, or red, green, blue, or white light, for example, from theorganic light-emitting diode OLED.

The pixel electrode 21 may include conductive oxide, such as indium tinoxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide(In₂O₃), indium gallium oxide (IGO), aluminum zinc oxide (AZO), or acombination thereof. In another embodiment, the pixel electrode 21 mayinclude a reflective layer including Ag, Mg, Al, Pt, Pd, gold (Au),nickel (Ni), neodymium (Nd), Ir, Cr, or a compound thereof. In anotherembodiment, the pixel electrode 21 may further include a layer formed ofITO, IZO, ZnO, or In₂O₃ on/under the above-described reflective layer.

A pixel-defining layer 19 having an opening 19OP for exposing the centerof the pixel electrode 21 may be arranged on the pixel electrode 21. Thepixel-defining layer 19 may include organic insulating materials and/orinorganic insulating materials. The opening 19OP may define an emissionarea EA of light emitted from the organic light-emitting diode OLED. Forexample, the width of the opening 19OP may correspond to the width ofthe emission area EA.

A light-emitting layer 22 may be arranged on the opening 19OP of thepixel-defining layer 19. The light-emitting layer 22 may include polymeror small molecular weight organic materials that emit light of certaincolors.

Although not shown, a first functional layer and a second functionallayer may be arranged under and on the light-emitting layer 22,respectively. The first functional layer may include a hole transportlayer (HTL) or an HTL or a hole injection layer (HIL), for example. Thesecond functional layer that may be a component arranged on thelight-emitting layer 22 may be optional. The second functional layer mayinclude an electron transport layer (ETL) and/or an electron injectionlayer (EIL). The first functional layer and/or the second functionallayer may be a common layer formed to entirely cover the substrate 10,like a common electrode 23 that will be described later.

The common electrode 23 may include conductive materials having a smallwork function. For example, the common electrode 23 may include a(semi-) transparent layer including Ag, magnesium (Mg), Al, Pt, Pd, Au,Ni, Nd, Ir, Cr, lithium (Li), calcium (Ca), or an alloy thereof. Asanother example, common electrode 23 may further include a layer, suchas ITO, IZO, ZnO, or In₂O₃, on the (semi-)transparent layer includingthe materials described above.

In an embodiment, the thin-film encapsulation layer TFE may include atleast one inorganic encapsulation layer and at least one organicencapsulation layer. In an embodiment, FIG. 10 illustrates that thethin-film encapsulation layer TFE includes a first inorganicencapsulation layer 31, an organic encapsulation layer 32, and a secondinorganic encapsulation layer 33, which may be sequentially stacked oneach other.

The first inorganic encapsulation layer 31 and the second inorganicencapsulation layer 33 may include one or more inorganic materials fromamong aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide,zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. Theorganic encapsulation layer 32 may include polymer-based materials. Thepolymer-based materials may include acryl-based resin, epoxy-basedresin, polyimide, polyethylene, or a combination thereof. In anembodiment, the organic encapsulation layer 32 may include acrylate.

In another embodiment, the thin-film encapsulation TFE may have astructure in which the substrate 10 and an upper substrate that may be atransparent member may be combined with each other by using a sealingmember and thus an internal space between the substrate 10 and the uppersubstrate may be sealed. An absorbent or filling material may bedeposited in the internal space. The sealing member may be a sealant. Inanother embodiment, the sealing member may include a material cured bylaser. For example, the sealing member may be frit. In detail, thesealing member may include urethane-based resin, epoxy-based resin,acryl-based resin, or a combination thereof that may be an organicsealant, or silicon that may be an inorganic sealant. The urethane-basedresin may include urethane acrylate, for example. The acryl-based resinmay include butylacrylate, ethylhexyl acrylate, or a combinationthereof. The sealing member may include a material cured by heat.

A touch electrode layer (not shown) including touch electrodes may bearranged on the thin-film encapsulation layer TFE, and an opticalfunctional layer (not shown) may be arranged on the touch electrodelayer. The touch electrode layer may attain coordinate informationaccording to an external input, for example, a touch event. The opticalfunctional layer may reduce reflectivity of light (external light)incident toward the display device 1 from the outside and/or may enhancecolor purity of light emitted from the display device 1. In anembodiment, the optical functional layer may include a phase retarderand a polarizer. The phase retarder may be of a film type or liquidcrystal coating type and may include a λ/2 phase retarder and/or a λ/4phase retarder. The polarizer may also be of a film type or liquidcrystal coating type. The film type may include an elongation-typesynthetic resin film, and the liquid crystal coating type may includeliquid crystals arranged in a certain arrangement. The phase retarderand the polarizer may further include a protective film.

In another embodiment, the optical functional layer may include a blackmatrix and color filters. The color filters may be arranged consideringa color of light emitted from each of the pixels of the display device1. Each of the color filters may include red, green, or blue pigment ordye. As another example, each of the color filters may further includequantum dots in addition to the pigment or dye described above. Asanother example, part of the color filters may not include the pigmentor dye described above and may include scattering particles such astitanium oxide.

In another embodiment, the optical functional layer may include adestructive interference structure. The destructive interferencestructure may include a first reflective layer and a second reflectivelayer arranged on different layers. First reflected light and secondreflected light reflected from the first reflective layer and the secondreflective layer, respectively, may interfere destructively, and thus,reflectivity of external light may be reduced.

An adhesion member may be arranged between the touch electrode layer andthe optical function layer. A general adhesion member known in the artmay be employed without limitation. The adhesion member may include apressure sensitive adhesive (PSA).

As described above, in embodiments, a belt, on which a base material maybe seated, may be precisely adjusted by using a meandering preventionportion. Thus, an apparatus for manufacturing a display device havinghigh reliability may be provided.

Also, a method of manufacturing a display device, whereby a polishingprocess having high reliability may be performed when the display devicemay be manufactured, may be provided.

It should be understood that embodiments described herein should beconsidered in a descriptive sense only and not for purposes oflimitation. Descriptions of features or aspects within each embodimentshould typically be considered as available for other similar featuresor aspects in other embodiments. While one or more embodiments have beendescribed with reference to the figures, it will be understood by thoseof ordinary skill in the art that various changes in form and detailsmay be made therein without departing from the spirit and scope asdefined by the following claims, including any equivalents.

What is claimed is:
 1. A method of manufacturing a display device, themethod comprising: observing alignment marks disposed on a first surfaceof a belt that circulates; comparing positions of the alignment markswith preset positions; and adjusting a position of the belt by using ameandering prevention portion in accordance with a result of thecomparing of the positions, wherein at least part of the meanderingprevention portion faces a second surface of the belt, the secondsurface being a side surface of the belt.
 2. The method of claim 1,wherein the adjusting of the position of the belt comprises moving themeandering prevention portion in a first direction to be in contact withthe belt.
 3. The method of claim 2, wherein the meandering preventionportion linearly moves the belt in the first direction.
 4. The method ofclaim 1, wherein the meandering prevention portion is disposed in aregion in which a moving direction of the belt changes.
 5. The method ofclaim 1, wherein the meandering prevention portion comprises: a firstroller of which at least a part faces the second surface; and a firstspacing adjusting portion that moves the first roller.
 6. The method ofclaim 1, wherein the observing of the alignment marks comprises removinga polish disposed on the alignment marks.
 7. The method of claim 1,further comprising cleaning a surface of the belt.
 8. The method ofclaim 1, further comprising pressing a third surface of the belt tomaintain a tension of the belt, the third surface of the belt beingopposite to the first surface of the belt.
 9. The method of claim 1,further comprising: disposing a base material on the first surface; andpolishing a surface of the base material by using a polishing head. 10.The method of claim 1, wherein the belt comprises an opening on whichthe base material is disposed.